arXiv:2502.02506v1 [physics.optics] 4 Feb 2025
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Improving Multi-wavelength Overlay Measurement Time by
Download Citation | On Oct 1, 2024, Hung-Chih Hsieh and others published Improving Multi-wavelength Overlay Measurement Time by the Development of Color-Mixing Light Source | Find, read and cite
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Improving multi-wavelength overlay measurement time by the
To achieve this, a color-mixing light source was developed, which employed light sources of different wavelengths, each modulated with different sine wave frequencies.